High-pressure intermittent spray "DP-Gun"
For cleaning various masks, glass, and after wafer polishing! Capable of opening and closing the nozzle 30 times per second, it delivers repeated impacts with a small amount of water.
A cleaning nozzle unit that requires less water and is less likely to create a water film, which can also be retrofitted to existing equipment. A cleaning nozzle that operates at a maximum of 30Hz. A pump that generates high-pressure water of 5 to 10 MPa. A combination with a control unit. Conventional continuous spraying applies pressure over a self-created water film, leading to an increase in cleaning power = increase in pressure = increase in flow rate, resulting in a thicker water film. However, the DP-Gun uses intermittent spraying, which means that even at the same pressure (impact), the flow rate is lower, making it less likely to form a water film, and the sprayed water directly impacts the target object. By repeatedly applying intermittent spray impacts, it demonstrates excellent cleaning effects in removing foreign substances from the items being cleaned, cleaning masks, and cleaning three-dimensional objects such as cassettes (with narrow grooves and complex shapes). The pump unit achieves stable water pressure control with minimal waste water during pressure adjustment by performing feedback control that matches flow rate changes due to nozzle opening and closing. *Please consult us regarding spraying a fixed amount of liquid and measurement + spray application. *Nozzles and pumps require regular maintenance.
- Company：ゼビオス（XEVIOS CORP.,）
- Price：Other
